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osWIS 100: Wafer Vision Inspection Machine
osWIS 100 Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer range from 120mm (6”) to 300mm (12”). |
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| osWIS 100 | |||
| Wafer Input Type & Size | Raw Wafer – 8” (200mm) , 12” (300mm) | ||
| Wafer Ring – 6” (150mm) , 8” (200mm) – manual loading | |||
| Framed Wafer – 6” (150mm) , 8” (200mm) , 12” (300mm) | |||
| Camera Lens | 2X | 5x | 7.5X |
| Accuracy | 2.2 μm / pixel | 0.9 μm / pixel | 0.6 μm / pixel |
| Field of View | 9.1mm x 9.1mm | 3.6mm x 3.6mm | 2.4mm x 2.4mm |
| System Capability | Offline Verifier | ||
| Optimize production yield. Once wafer inspection is completed, user can identify, review and reclassify inspection result with Offline Verifier. | |||
| Wafer Automated Loader-Unloader | |||
| Auto handling supports up to 300mm (12”) raw wafer, hoop ring and framed wafer. | |||
| Inspection |  |
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